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Thin Film Measurement System TF-166
Introduction
Based on interference spectral analysis of multi-layer reflection curves, this instrument functions non-contact optical measurement of thickness, refractive index, and absorption index of various optical thin films and coatings. This is a basic low-cost system.
Applications
Dielectric coatings on optical components, coated optical filters, semiconductor fabrication on wafers, liquid crystal devices, multi-layer polymer films.
Example thin film layer: SiO2, CaF2, MgF2, Photoresist, Polysilicon, Amorphous Silicon, SiNx, TiO2, Sol-Gel, Polyimide, Polymer Film.
Example substrate material: Silicon, Germanium, GaAs, ZnS, ZnSe, Acrylic, Sapphire, Glasses, Polycarbonate, Polymer, Quartz.
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Thin Film Panel
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Specifications
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Thin Film Thickness Measurement System
- One Thin Film Measurement main machine (110V-240V AC), Including a Tungsten Halogen light source and a PC based optical mini spectrometer with USB interface.
- Beam transfer, projection, and receiving fiber cables and optical assemblies
- New Span Thin Film Measurement Software version 5.1
- One Silicon wafer as reflectance standard
- Supporting hardware
- PC requirement: >800 MHz clock, RAM 1 GB, Windows Vista, 7, 8, or Windows 10.
Separate Use of the Contained Light Source or Spectrometer
The main machine includes one Tungsten Halogen light source (360-2500 nm) and one PC-based USB mini spectrometer (350-1000 nm), each features an SMA 905 Connector.
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By disconnecting the optical fibers of the optical head of the main machine, they can be coupled through optical fibers for other illumination or spectroscopic measurement applications. Basic spectrometer software included.
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Measurement Features
- Substrate refractive index and absorption index evaluation
- Film thickness measurement, mean and standard deviation
- Film material refractive index and absorption index evaluation
- Saving of measured spectral dependent reflectance data
- Data loading of previously saved reflectance data
- Statistics of measurement results
- User friendly cursor controlled display of measured results
- Flexible choice of computation wavelength range
- Flexible choice of guess thickness range to minimize computation time
- Convenient selection of film and substrate materials from included database
- User defined materials selection and import.
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