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Thin Film Measurement and Optical Thin Film Reflectometer


Optical Thin Film Reflectometer based high resolution optical thin film measurement system. Compact fiber based non-contact measurement that is user friendly. Offers lower cost solution for quantifying multi-layer coating film thickness in seconds. Also capable of measuring refractive and absorption indices of the film. Easy to handle. Minimal adjustment.

Thin Film Measurement

New Span Opto-Technology Inc. offers thin film measurement systems. It is also called thin film reflectometer that is much easier to operate than an ellipsometer system. It is based on spectroscopic reflectance measurement of the thin films and perform data analysis to determine the thin films thicknesses. It can also determine refractive indices and absorption indices of the thin films. The thin film measurement systems can support desktop and in-line measurements.

Our thin film measurement systems, TF-166 and TF-168 offer most cost effective solution for measuring films from 20 nm to 50 Ám in thickness. Advanced system can offer thickness measurement from 5 nm to 200 Ám. The data analysis for many thin films can be done within a second. Integrated with motion control, the TF-268 system can offer thickness surface mapping showing surface uniformity of the thin films. The TF-168M system can be integrated with a conventional microscope at the camera port for thin film measurement on a sample area as small as 5 Ám in diameter.

Our thin film measurement systems use a USB spectrometer, a fiber reflectance probe, and a light source. The data analysis can show a best fit to the spectral reflectance data and obtain the thin films thicknesses. The spectrometer can also be separately used for other measurement purposes defined by user.

After using our thin film measurement systems, user may request custom reconfiguration of the thin film measurement software to add system integrating features. For example, the thin film measurement system can be used in a polymer production industry for in-line thin film thickness monitoring. The ability of custom reconfiguration for industrial system integration may be considered as a valuable feature offered by us.

  Thin-Film Measurement TF-166

Based on interference spectral analysis of multi-layer spectral reflection curves, this instrument functions non-contact optical measurement of thickness, refractive index, and absorption index of various optical thin films and coatings. TF-166 is a lower cost basic unit with flexibility of measurement adjustment.
  Thin-Film Measurement TF-168

Based on interference spectral analysis of multi-layer spectral reflection curves, this instrument functions non-contact optical measurement of thickness, refractive index, and absorption index of various optical thin films and coatings. TF-168 is an improved system of TF-166 yet is lower cost with flexibility of measurement adjustment.
  Thin-Film Measurement TF-168M

TF-168M thin film measurement system is a modified TF-168 system offering an additional long optical fiber and an adaptor that can be coupled to the top of an optical microscope (traditional camera mounting location) to facilitate local film spot measurement under the microscope alignment. The measurement spot can be as small as 5 micron.
  Thin-Film Measurement TF-268

With a vacuum assisted wafer holder and translation/rotation motion control, TF-268 thin film measurement system is capable of all the features offered by TF-168 yet is able to provide thickness mapping of the measured sample.

Thin Film Reflectometer

Our thin film measurement is also called a thin film reflectometer. It is based on spectroscopic reflectometry measurement involving illuminating the measurement thin film sample with a tungsten halogen light or deuterium-halogen light at surface normal incidence. The films thicknesses, refractive indices (n) and absorption indices (k) can be obtained through spectral reflectance curve fitting. The measurement is quite accurate, typically within 1 nm or ▒0.5% of the film thickness. The thin film reflectometer is easy to operate. The system can be integrated for in-line thin film production quality monitoring.

 
 
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